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| Nabtesco Dry Vacuum Pump Awarded the Prize of the Minister of Economy, Trade and Industry for Superior Energy-Conserving Machinery |
February 1, 2005 |
A scene from the commendation ceremony
at Capitol Tokyu Hotel
(click photo to enlarge)
Our President Okitsu giving an address
of thanks for receiving the award
(click photo to enlarge) |
Our Two-stage Screw Dry Vacuum Pump "vigo-vac" has won the Prize of the Minister of Economy, Trade and Industry for the 25th (fiscal 2004) Superior Energy-Conserving Machinery.
The Commendation System for Superior Energy-Conserving Machinery is a system sponsored by the Japan Machinery Federation, which publicly recognizes personnel, companies, or other organizations who have contributed to the promotion of the efficient use of energy by developing and commercializing superior energy-conserving machinery, thereby encouraging the dissemination and development of superior energy-saving equipment. In fiscal year 2004, the following prizes were awarded: the Prize of the Minister of Economy, Trade and Industry for one machine/system, the Prize of the Director-General of Agency of Natural Resources and Energy for one machine, and the Japan Machinery Federation Presidential Prize for ten machines/systems. Among them, the Prize of the Minister of Economy, Trade and Industry is the highest award.
Dry vacuum pumps used to exhaust gas emissions from the vacuum chamber of semiconductor manufacturing equipment are said to be responsible for about 20% of the total power consumption of semiconductor factories. To countermeasure global warming and to reduce manufacturing costs, the demand for energy saving has been increasing.
The "vigo-vac" was developed as a product to cope with such demand, and the prize was awarded because of its superior energy-saving performance 1), alleviation of the environmental load 2), and reduction of running costs 3), the details of which are further explained as follows: |
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(1) For the first time in the world, screw rotors with a high compression ratio were adopted for the booster pump. This made it possible to downsize the main pump, which has high power consumption, to about one-tenth,* and to cut power consumption by as much as 54 to 77%*, compared with the conventional type.
(2) The volume of cooling water used decreased to about one-third of the conventional type*, which resulted in a significant reduction of CO2 gas emitted throughout the lifecycle of the pump.*
(3) The overhaul cycle is over two times longer than that of the conventional pump due to our own heat insulation structure to control reactant byproducts causing performance deterioration and equipment failures*, which reduced checkup and maintenance costs.
[Note] Statements marked with "*" were made based on our survey, and the above figures may vary depending on use conditions. |
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