TS Corporation participates in SEMICON WEST 2004.

July 21, 2004

TS Corporation, a subsidiary of Nabtesco, participated in international trade show for semiconductor manufacturing equipments trade show "SEMICON WEST 2004" which to be held in San Francisco from 12 to 14 June 2004. * Click photo to enlarge

The company exhibits * Dry vacuum pump (EV4002, EV10004) Oil free for keeping clean environment in the manufacturing process, less cooling water consumption and world's lowest power consumption. * Dual-axis vacuum transfer system Compact and less power consumption unit used in transfer chamber of semiconductor manufacturing equipment for transferring wafers. * Precision Servo Actuator (AR series) Consisted of presicion reduction gear and motor, used in handling and lotation units. * Produtcs from Harmonic Drive Technologies Nabtesco Inc. Small size precision reduction gears and applied products (High Vacuum Feed Through Actuator, etc.) from an affiliated company Harmonic Drive Technologies Nabtesco Inc.

Holding period:	12 - 14 July, 2004
Holding hours:	10:00 - 18:00 (10:00 - 16:00 for 14 July)
Place:	Moscone Center 747 Howard Street, San Francisco, California U.S.A.
Inquiry:	New product development department 1, Office of technical development, TS Corporation TEL:+81-3-3578-7463 FAX:+81-3-3578-7471